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Focused Ion Beam
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Focused Ion Beam
Dual Beam Focused Ion Beam - SEM (FEI Strata DB235)
Contact: Craig Johnson
Important Features
Site specific precision ion milling and metal deposition for 3D nanomachining, materials characterization, nanopatterning and nanofabrication.
High brightness gallium ion beam
Gas injection systems for platinum and insulator deposition
Secondary electron and secondary ion imaging
High-resolution in-lens secondary electron detector
Omniprobe in-situ micromanipulator for preparation and manipulation (lift-out) of TEM samples
Integrated X-ray fluorescence analyzer with a separate X-ray source providing high sensitivity for trace analysis of elemental composition (IXRF)
Energy dispersive X-ray analysis (EDS) with e-beam
Combined XRF-EDS spectral and mapping capabilities
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